@misc{indiciaeabe38e2d2906,
  title = {Optical coupler for heterogeneous integration},
  author = {Gehl, Michael and Vawter, Gregory A. and Hoffman, Galen},
  year = {2021},
  url = {https://www.osti.gov/biblio/1860029},
  note = {Source identifier: 1860029}
}