@misc{indiciaef409c5435e44,
  title = {Low-power High-throughput Talbot Array Scanning Volumetric Lithographic System},
  author = {Aye, Tin and Chan, Kenneth},
  year = {2021},
  url = {https://www.osti.gov/biblio/1833865},
  note = {Source identifier: 1833865}
}