@misc{indiciaeb8c65424ae84,
  title = {Low-Temperature Processing for Atomically Precise Dopant Incorporation with CMOS Integration.},
  author = {Schmucker, Scott William and Anderson, Evan Michael and Frederick, Esther and Ivie, Jeffrey Andrew and Bussmann, Ezra and Campbell, DeAnna Marie and Tracy, Lisa A and Lu, Tzu-Ming and Lu, Ping and Wang, George T. and Ward, Daniel and Misra, Shashank},
  year = {2020},
  doi = {10.2172/1830910},
  url = {https://www.osti.gov/biblio/1830910},
  note = {Source identifier: 1830910}
}