@misc{indiciae20616b8c1ba1,
  title = {Three dimensional vertically structured electronic devices},
  author = {Conway, Adam and Harrison, Sara Elizabeth and Nikolic, Rebecca J. and Shao, Qinghui and Voss, Lars},
  year = {2021},
  url = {https://www.osti.gov/biblio/1824032},
  note = {Source identifier: 1824032}
}