TY  - RPRT
TI  - Three dimensional vertically structured electronic devices
AU  - Conway, Adam
AU  - Harrison, Sara Elizabeth
AU  - Nikolic, Rebecca J.
AU  - Shao, Qinghui
AU  - Voss, Lars
PY  - 2021
UR  - https://www.osti.gov/biblio/1823999
ID  - 1823999
ER  -