@misc{indiciae43825e1569ff,
  title = {Three dimensional vertically structured electronic devices},
  author = {Conway, Adam and Harrison, Sara Elizabeth and Nikolic, Rebecca J. and Shao, Qinghui and Voss, Lars},
  year = {2021},
  url = {https://www.osti.gov/biblio/1823999},
  note = {Source identifier: 1823999}
}