@misc{indiciae0666116939e1,
  title = {Atomic-precision advanced manufacturing for Si quantum computing},
  author = {Bussmann, Ezra (ORCID:0000000252852825) and Butera, Robert E. and Owen, James H. G. and Randall, John N. and Rinaldi, Steven M. and Baczewski, Andrew D. and Misra, Shashank},
  year = {2021},
  doi = {10.1557/s43577-021-00139-8},
  url = {https://www.osti.gov/biblio/1813068},
  note = {Source identifier: 1813068}
}