TY  - RPRT
TI  - Wafer-based charged particle accelerator, wafer components, methods, and applications
AU  - Lal, Amit
AU  - Schenkel, Thomas
AU  - Persaud, Arun
AU  - Ji, Qing
AU  - Seidl, Peter
AU  - Waldron, Will
AU  - Ardanuc, Serhan
AU  - Kadayra Basavarajappa, Vinaya Kumar
PY  - 2021
UR  - https://www.osti.gov/biblio/1805487
ID  - 1805487
ER  -