@misc{indiciaed13e6f3db0a0,
  title = {A fitting algorithm for optimizing ion implantation energies and fluences},
  author = {Kehayias, Pauli Mark and Henshaw, Jacob Daniel and Saleh Ziabari, Maziar and Titze, Michael Dominik and Bielejec, Edward S. and Lilly, Michael P. and Mounce, Andrew M.},
  year = {2021},
  doi = {10.1016/j.nimb.2021.05.014},
  url = {https://www.osti.gov/biblio/1798144},
  note = {Source identifier: 1798144}
}