@misc{indiciae0cfdb0ad04fb,
  title = {Fluoridation of HfO[subscript 2]},
  author = {Flynn, Steven and Zhang, Chi and Griffith, Kent J. and Shen, Jiahong and Wolverton, Christopher and Dravid, Vinayak P. and Poeppelmeier, Kenneth R.},
  year = {2021},
  doi = {10.1021/acs.inorgchem.0c03254},
  url = {https://www.osti.gov/biblio/1786013},
  note = {Source identifier: 1786013}
}