@misc{indiciae04f71fb12a5b,
  title = {Area-selective atomic layer deposition enabled by competitive adsorption},
  author = {Suh, Taewon (ORCID:0000000163823811) and Yang, Yan and Sohn, Hae Won and DiStasio, Jr., Robert A. (ORCID:000000032732194X) and Engstrom, James R. (ORCID:0000000185058188)},
  year = {2020},
  doi = {10.1116/6.0000497},
  url = {https://www.osti.gov/biblio/1708925},
  note = {Source identifier: 1708925}
}