@misc{indiciaec33dbbeae2bc,
  title = {Tutorial on forming through-silicon vias},
  author = {Burkett, Susan L. and Jordan, Matthew B. and Schmitt, Rebecca P. and Menk, Lyle A. and Hollowell, Andrew E.},
  year = {2020},
  doi = {10.1116/6.0000026},
  url = {https://www.osti.gov/biblio/1697991},
  note = {Source identifier: 1697991}
}