TY - RPRT TI - Microengineering Pressure Sensor Active Layers for Improved Performance AU - Ruth, Sara Rachel Arussy AU - Feig, Vivian Rachel AU - Tran, Helen AU - Bao, Zhenan PY - 2020 DO - 10.1002/adfm.202003491 UR - https://www.osti.gov/biblio/1646922 ID - 1646922 ER -