@misc{indiciae7f4d02b5c7b9, title = {Phase estimation algorithm for the multibeam optical metrology}, author = {Zemlyanov, V. V. and Kirsanov, N. S. and Perelshtein, M. R. and Lykov, D. I. and Misochko, O. V. and Lebedev, M. V. and Vinokur, V. M. and Lesovik, G. B.}, year = {2020}, doi = {10.1038/s41598-020-65466-3}, url = {https://www.osti.gov/biblio/1637468}, note = {Source identifier: 1637468} }