TY  - RPRT
TI  - Method for lithograghic patterning of sensitive materials
AU  - Melosh, Nicholas Alexander
AU  - Angle, Matt R.
AU  - Hanna, Mina-elraheb S.
AU  - Kong, Yifan
PY  - 2020
UR  - https://www.osti.gov/biblio/1632641
ID  - 1632641
ER  -