TY  - RPRT
TI  - Sequential infiltration synthesis for enhancing multiple-patterning lithography
AU  - Darling, Seth B.
AU  - Elam, Jeffrey W.
AU  - Tseng, Yu-Chih
PY  - 2020
UR  - https://www.osti.gov/biblio/1632615
ID  - 1632615
ER  -