TY  - RPRT
TI  - Development of highly efficient NEG pumping system for EBIS
AU  - Kondrashev, Sergey
AU  - Beebe, E.
AU  - Coe, B.
AU  - Ritter, J.
AU  - Rodowicz, T.
AU  - Schoepfer, R.
PY  - 2019
DO  - 10.1063/1.5127751
UR  - https://www.osti.gov/biblio/1575914
ID  - 1575914
ER  -