@misc{indiciae0fee569e2332,
  title = {Single Atom Deposition},
  author = {Biedermann, Grant W. and Chow, Weng W.},
  year = {2014},
  doi = {10.2172/1490664},
  url = {https://www.osti.gov/biblio/1490664},
  note = {Source identifier: 1490664}
}