@misc{indiciaed6125181dc35,
  title = {Mask alignment system for semiconductor processing},
  author = {Webb, Aaron P. and Carlson, Charles T. and Weaver, William T. and Grant, Christopher N.},
  year = {2017},
  url = {https://www.osti.gov/biblio/1343746},
  note = {Source identifier: 1343746}
}