@misc{indiciae13d14b2835f8,
  title = {MEMS component reliability testing.},
  author = {Lopez, John Robert and Buchheit, Thomas Edward and Kudiya, Abdul and Potter-Shields, Judy and Clements, James W. and Thompson, Rachelle and Benavidez, Christina and Bitsie, Fernando and Johnson, Evan P. and Spletzer, Matthew A.},
  year = {2011},
  url = {https://www.osti.gov/biblio/1288876},
  note = {Source identifier: 1288876}
}