@misc{indiciaeadca921da5fd,
  title = {Silicon force sensor},
  author = {Galambos, Paul C. and Crenshaw, Thomas B. and Nishida, Erik E. and Burnett, Damon J. and Lantz, Jeffrey W.},
  year = {2016},
  url = {https://www.osti.gov/biblio/1260241},
  note = {Source identifier: 1260241}
}