@misc{indiciae3cc9a1abd6c6,
  title = {Implementing inverted master-slave 3D semiconductor stack},
  author = {Coteus, Paul W. and Hall, Shawn A. and Takken, Todd E.},
  year = {2016},
  url = {https://www.osti.gov/biblio/1241310},
  note = {Source identifier: 1241310}
}