TY  - RPRT
TI  - Patterning by area selective oxidation
AU  - Nam, Chang-Yong
AU  - Kamcev, Jovan
AU  - Black, Charles T.
AU  - Grubbs, Robert
PY  - 2015
UR  - https://www.osti.gov/biblio/1234237
ID  - 1234237
ER  -