@misc{indiciaecead72c2f334,
  title = {Carbon MEMS accelerometer.},
  author = {Washburn, Cody M. and Hance, Bradley G. and Rohwer, Tedd A. and McBrayer, John D. and Wheeler, David Roger and Williams, Randy J. and Greth, Karl Douglas and Strong, Jennifer and Finnegan, Patrick Sean},
  year = {2011},
  url = {https://www.osti.gov/biblio/1109435},
  note = {Source identifier: 1109435}
}