TY  - RPRT
TI  - Interferometric Lithography Patterned Pyrolytic Carbon.
AU  - Burckel, David Bruce
AU  - Polsky, Ronen
AU  - Washburn, Cody M.
AU  - Wheeler, David Roger
AU  - Xiao, Xiaoyin
PY  - 2011
UR  - https://www.osti.gov/biblio/1107719
ID  - 1107719
ER  -