@misc{indiciae9528dea25c74,
  title = {Interferometric Lithography Patterned Pyrolytic Carbon.},
  author = {Burckel, David Bruce and Polsky, Ronen and Washburn, Cody M. and Wheeler, David Roger and Xiao, Xiaoyin},
  year = {2011},
  url = {https://www.osti.gov/biblio/1107719},
  note = {Source identifier: 1107719}
}