@misc{indiciae4887ff1a4984,
  title = {Ultra-high density diffraction grating},
  author = {Padmore, Howard A. and Voronov, Dmytro L. and Cambie, Rossana and Yashchuk, Valeriy V. and Gullikson, Eric M.},
  year = {2012},
  url = {https://www.osti.gov/biblio/1082356},
  note = {Source identifier: 1082356}
}