@misc{indiciaefc1bc52a13c1,
  title = {TaN resistor process development and integration.},
  author = {Romero, Kathleen and Martinez, Marino John and Clevenger, Jascinda and Austin, IV, Franklin H and Sullivan, Charles Thomas and Wolfley, Steven L and Patrizi, Gary A and Vigil, Pablita S and Grine, Alejandro J},
  year = {2010},
  url = {https://www.osti.gov/biblio/1014642},
  note = {Source identifier: 1014642}
}