TY  - RPRT
TI  - MEMS Micro Valve for Space Applications
AU  - Mueller, J.
AU  - Tang, W.
AU  - Bame, D.
AU  - Chakraborty, I.
PY  - 1999
UR  - https://ntrs.nasa.gov/citations/20210002984
ID  - 20210002984
ER  -