@misc{indiciaed2df20dee8db,
  title = {Wafer-To-Wafer Alignment Method},
  author = {Jung-Kubiak, Cecile and Reck, Theodore and Thomas, Bertrand and Lin, Robert H. and Peralta, Alejandro and Gill, John J. and Lee, Choonsup and Siles, Jose V. and Toda, Risaku and Chattopadhyay, Goutam and Cooper, Ken B. and Mehhdi, Imran},
  year = {2018},
  url = {https://ntrs.nasa.gov/citations/20180008162},
  note = {Source identifier: 20180008162}
}