@misc{indiciae49b8748327a1,
  title = {Silicon Micromachining for Terahertz Component Development},
  author = {Chattopadhyay, Goutam and Reck, Theodore J. and Jung-Kubiak, Cecile and Siles, Jose V. and Lee, Choonsup and Lin, Robert and Mehdi, Imran},
  year = {2013},
  url = {https://ntrs.nasa.gov/citations/20150008048},
  note = {Source identifier: 20150008048}
}