@misc{indiciae3b1f9c264402,
  title = {Processing of Nanostructured Devices Using Microfabrication Techniques},
  author = {Hunter, Gary W and Xu, Jennifer C and Evans, Laura J and Kulis, Michael H and Berger, Gordon M and Vander Wal, Randall L},
  year = {2014},
  url = {https://ntrs.nasa.gov/citations/20150003370},
  note = {Source identifier: 20150003370}
}