@misc{indiciaed43d36349164,
  title = {Wafer-Level Membrane-Transfer Process for Fabricating MEMS},
  author = {Yang, Eui-Hyeok and Wiberg, Dean},
  year = {2003},
  url = {https://ntrs.nasa.gov/citations/20110024097},
  note = {Source identifier: 20110024097}
}