@misc{indiciae6338f5a8e7b8,
  title = {Method for selective CMP of polysilicon},
  author = {Babu, Suryadevara V. and Natarajan, Anita and Hegde, Sharath},
  year = {2010},
  url = {https://ntrs.nasa.gov/citations/20100027535},
  note = {Source identifier: 20100027535}
}