TY  - RPRT
TI  - Multiple internal seal right micro-electro-mechanical system vacuum package
AU  - Hayworth, Ken J.
AU  - Yee, Karl Y.
AU  - Shcheglov, Kirill V.
AU  - Bae, Youngsam
AU  - Wiberg, Dean V.
AU  - Challoner, A. Dorian
AU  - Peay, Chris S.
PY  - 2007
UR  - https://ntrs.nasa.gov/citations/20080009628
ID  - 20080009628
ER  -