@misc{indiciae59fc8af5689d,
  title = {Multiple internal seal right micro-electro-mechanical system vacuum package},
  author = {Hayworth, Ken J. and Yee, Karl Y. and Shcheglov, Kirill V. and Bae, Youngsam and Wiberg, Dean V. and Challoner, A. Dorian and Peay, Chris S.},
  year = {2007},
  url = {https://ntrs.nasa.gov/citations/20080009628},
  note = {Source identifier: 20080009628}
}