@misc{indiciae0fb36c67d97b,
  title = {X-ray lithography masking},
  author = {Smith, Henry I. and Lim, Michael and Carter, James and Schattenburg, Mark},
  year = {1998},
  url = {https://ntrs.nasa.gov/citations/20080004562},
  note = {Source identifier: 20080004562}
}