@misc{indiciae9476763a90ba,
  title = {Diffractive optical elements on non-flat substrates using electron beam lithography},
  author = {Maker, Paul D. and Muller, Richard E. and Wilson, Daniel W.},
  year = {2002},
  url = {https://ntrs.nasa.gov/citations/20080004513},
  note = {Source identifier: 20080004513}
}