@misc{indiciae2cfd8c8309a8,
  title = {Fluidized bed silicon deposition from silane},
  author = {Hsu, George C. and Levin, Harry and Hogle, Richard A. and Praturi, Ananda and Lutwack, Ralph},
  year = {1982},
  url = {https://ntrs.nasa.gov/citations/20080004228},
  note = {Source identifier: 20080004228}
}