TY  - RPRT
TI  - Multi-wafer slicing with a fixed abrasive
AU  - Schmid, Frederick
AU  - Khattak, Chandra P.
AU  - Smith, Maynard B.
PY  - 1988
UR  - https://ntrs.nasa.gov/citations/20080004089
ID  - 20080004089
ER  -