@misc{indiciae2c7e7a3628a7,
  title = {Quantum Interferometric Lithography: Exploiting Enganglement to Beat the Diffraction Limit},
  author = {Dowling, J. and Boto, A. and Abrams, D. and Williams, C.},
  year = {2000},
  url = {https://ntrs.nasa.gov/citations/20060041003},
  note = {Source identifier: 20060041003}
}