@misc{indiciae19466a06edcc,
  title = {Precision actuation of micro-space structures},
  author = {Lih, S. S. and Hickey, G. and Wang, D. W. and Tzou, H. S.},
  year = {2000},
  url = {https://ntrs.nasa.gov/citations/20060033310},
  note = {Source identifier: 20060033310}
}