TY  - RPRT
TI  - ICP Reactor Modeling: CF4 Discharge
AU  - Bose, Deepak
AU  - Govindan, T. R.
AU  - Meyyappan, M.
PY  - 1999
UR  - https://ntrs.nasa.gov/citations/20040084669
ID  - 20040084669
ER  -