@misc{indiciaebace97b63447,
  title = {ICP Reactor Modeling: CF4 Discharge},
  author = {Bose, Deepak and Govindan, T. R. and Meyyappan, M.},
  year = {1999},
  url = {https://ntrs.nasa.gov/citations/20040084669},
  note = {Source identifier: 20040084669}
}