@misc{indiciae458d790193f7,
  title = {Simulation of Etching Profiles Using Level Sets},
  author = {Hwang, Helen and Govindan, T. R. and Meyyappan, M. and Arnold, James O.},
  year = {1998},
  url = {https://ntrs.nasa.gov/citations/20020061378},
  note = {Source identifier: 20020061378}
}