TY  - RPRT
TI  - A Coupled Plasma Dynamics and Gas Flow Model for Semiconductor Processing
AU  - Bose, Deepak
AU  - Govindan, T. R.
AU  - Meyyappan, M.
AU  - Arnold, James O.
PY  - 1998
UR  - https://ntrs.nasa.gov/citations/20020060760
ID  - 20020060760
ER  -