@misc{indiciae3450f13ef72e,
  title = {A Coupled Plasma Dynamics and Gas Flow Model for Semiconductor Processing},
  author = {Bose, Deepak and Govindan, T. R. and Meyyappan, M. and Arnold, James O.},
  year = {1998},
  url = {https://ntrs.nasa.gov/citations/20020060760},
  note = {Source identifier: 20020060760}
}