TY  - RPRT
TI  - Sub-Optical Lithography With Nanometer Definition Masks
AU  - Hartley, Frank T.
AU  - Malek, Chantal Khan
AU  - Neogi, Jayant
PY  - 2000
UR  - https://ntrs.nasa.gov/citations/20000075278
ID  - 20000075278
ER  -