@misc{indiciae009df9fdb53f,
  title = {Sub-Optical Lithography With Nanometer Definition Masks},
  author = {Hartley, Frank T. and Malek, Chantal Khan and Neogi, Jayant},
  year = {2000},
  url = {https://ntrs.nasa.gov/citations/20000075278},
  note = {Source identifier: 20000075278}
}