TY  - RPRT
TI  - MEMS Micro-Valve for Space Applications
AU  - Chakraborty, I.
AU  - Tang, W. C.
AU  - Bame, D. P.
AU  - Tang, T. K.
PY  - 1998
UR  - https://ntrs.nasa.gov/citations/20000052736
ID  - 20000052736
ER  -